LEXT OLS5100

3D Laser Scanning Microscope

Laser Microscope for Material Analysis Smart Workflow, Faster Experiments

Built for failure analysis and material engineering research, the OLS5100 laser microscope combines exceptional measurement accuracy and optical performance with smart tools that make the microscope easy to use. Precisely measure shape and surface roughness at the submicron level quickly and efficiently to simplify your workflow with data you can trust.

Guaranteed Measurement Accuracy

LEXT microscope objectives deliver highly accurate measurement data. Paired with the Smart Lens Advisor, you can acquire accurate data you can be confident in.

Guaranteed measurement accuracy

10x to 100x objectives that reduce aberrations at 405 nm to capture the correct shape of your sample throughout the entire field of view

Smart Lens Advisor helps you choose the right objective lens for your roughness measurement

Easy Laser Scanning Microscopy

Using the microscope is easy for novice and experienced users thanks to thoughtfully designed software.

Acquire accurate data easily—put your sample on the stage and press the start button
Measurement performance guarantee tailored to your operating environment

Easier Material Engineering and Failure Analysis

The Smart Experiment Manager makes your submicron 3D observation and failure analysis experiment workflows simpler by automating previously time-consuming tasks.

Automate your analysis workflow with macro functions

Measurement data is easy to organize

Autopopulates data to your experiment plan matrix, reducing the chance of input errors
Measurement results are displayed in a list, enabling a pass/fail judgment at a glance.