LEXT OLS5500

3D Optical Profilometers for Surface Metrology

Surface Data You Can Trust. Accuracy We Can Prove.

3D optical profilometers use noncontact measurement to capture high-precision surface data, making them ideal for delicate or complex parts in materials science, R&D, and manufacturing QA/QC.

Evident 3D optical profilometers set a new standard in precision surface measurement, providing measurement confidence with precise surface detail, traceable accuracy, and smart automation.

LEXT OLS5500

Hybrid 3D Optical Profilometer

Traceable surface measurements from the nanometer to micrometer scale

Laser scanning microscopy (LSM), white light interferometry (WLI), and focus variation microscopy (FVM) in one award-winning platform

First 3D optical profilometer to offer guaranteed accuracy and repeatability* for both LSM and WLI measurements

WLI mode delivers up to 40x faster measurement throughput than conventional LSM

Exceptional precision across surfaces with in-house engineered optics

Intuitive interface and smart automation streamline operation for users of all levels

AI-enhanced and high-throughput workflows with PRECiV™ software integration

Guaranteed Measurement Accuracy

LEXT microscope objectives deliver highly accurate measurement data. Paired with the Smart Lens Advisor, you can acquire accurate data you can be confident in.

Guaranteed measurement accuracy

10x to 100x objectives that reduce aberrations at 405 nm to capture the correct shape of your sample throughout the entire field of view

Smart Lens Advisor helps you choose the right objective lens for your roughness measurement

Easy Laser Scanning Microscopy

Using the microscope is easy for novice and experienced users thanks to thoughtfully designed software.

Acquire accurate data easily—put your sample on the stage and press the start button
Measurement performance guarantee tailored to your operating environment

Easier Material Engineering and Failure Analysis

The Smart Experiment Manager makes your submicron 3D observation and failure analysis experiment workflows simpler by automating previously time-consuming tasks.

Automate your analysis workflow with macro functions

Measurement data is easy to organize

Autopopulates data to your experiment plan matrix, reducing the chance of input errors
Measurement results are displayed in a list, enabling a pass/fail judgment at a glance.